Reference number
ISO 20341:2003
International Standard
ISO 20341:2003
Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
Edition 1
2003-07
Read sample
ISO 20341:2003
34162
Published (Edition 1, 2003)
This publication was last reviewed and confirmed in 2019. Therefore this version remains current.

ISO 20341:2003

ISO 20341:2003
34162
Language
Format
CHF 42
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Abstract

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

General information

  •  : Published
     : 2003-07
    : International Standard confirmed [90.93]
  •  : 1
     : 5
  • ISO/TC 201/SC 6
    71.040.40 
  • RSS updates

Life cycle

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