International Standard
ISO 25178-603:2013
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Reference number
ISO 25178-603:2013
ISO 25178-603:2013
Edition 1
2013-10
2013-10
© ISO 2024
International Standard
p
ISO 25178-603:2013
61236
Published
(Edition 1, 2013)
This standard was last reviewed and confirmed in 2018.
Therefore this version remains current.
Expected to be replaced by ISO/DIS 25178-603 within the coming months.
Abstract
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
General information
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Status: PublishedPublication date: 2013-10Stage: International Standard to be revised [90.92]
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Edition: 1Number of pages: 28
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Technical Committee :ISO/TC 213ICS :17.040.20
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Next version under development
Draft International Standard
ISO/DIS 25178-603
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
Reference number
ISO/DIS 25178-603
ISO/DIS 25178-603
Edition 1
© ISO 2024
Draft
International StandardISO/DIS 25178-603
Geometrical product specifications (GPS) — Surface texture: Areal
Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
Life cycle
-
Now
-
Will be replaced by
Under developmentISO/DIS 25178-603
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