Abstract
This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.
This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
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General information
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Status: PublishedPublication date: 2019-01Stage: International Standard under systematic review [90.20]
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Edition: 1Number of pages: 16
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Technical Committee :ISO/TC 112ICS :23.160
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