Reference number
ISO 20411:2018
© ISO 2024
International Standard
ISO 20411:2018
Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry
Edition 1
2018-03
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Published (Edition 1, 2018)

ISO 20411:2018

Language
Format
CHF 96
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Abstract

ISO 20411:2018 specifies a method for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale in pulse counting magnetic sector-type secondary ion mass spectrometers or quadrupole secondary ion mass spectrometers. It uses a test based on depth profile analysis of two isotopes in a reference material which has a gradual concentration change between low and high concentration regimes. It also includes a correction method for saturated intensity caused by the dead time of the detector. The correction can increase the intensity range for 95 % linearity so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction equations have been shown to be valid.

ISO 20411:2018 does not apply to time of flight mass spectrometers.

ISO 20411:2018 is only applicable to elements with minor isotopes. It is not applicable if the element is monoisotopic or contains isotopes with equal abundances.

General information

  • Status
     : Published
    Publication date
     : 2018-03
    Stage
    : International Standard to be revised [90.92]
  • Edition
     : 1
    Number of pages
     : 15
  • Technical Committee :
    ISO/TC 201/SC 6
    ICS :
    71.040.40 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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