Committee Draft
ISO/CD 19383
Atomic Layer Deposition-- Chemical characteristics and related process specifications of atomic layer deposition precursors
Reference number
ISO/CD 19383
Edition 1
Committee Draft
ISO/CD 19383
89126
A draft is being reviewed by the committee.

Abstract

This document describes the chemical characteristics and related process specifications of the atomic layer deposition precursors, including assay content, metal purity, and anion content specification.

General information

  •  : Under development
    : CD consultation initiated [30.20]
  •  : 1
  • ISO/TC 107
  • RSS updates

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