Committee Draft
ISO/CD 25164
Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification
Reference number
ISO/CD 25164
Edition 1
Committee Draft
ISO/CD 25164
89207
A draft is being reviewed by the committee.

Abstract

This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.

General information

  •  : Under development
    : Close of comment period [30.60]
  •  : 1
  • ISO/TC 107/SC 9
  • RSS updates

Got a question?

Check out our Help and Support