Reference number
ISO 18114:2021
ISO 18114:2021
© ISO 2024
International Standard
ISO 18114:2021
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
Edition 2
2021-05
2021-05
Resumen
This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.
The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2021-05Etapa: Norma Internacional publicada [60.60]
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Edición: 2Número de páginas: 4
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Comité Técnico :ISO/TC 201/SC 6ICS :71.040.40
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Ciclo de vida
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Anteriormente
RetiradaISO 18114:2003
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Ahora
